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A D V A N C E D
M A T E R I A L S
&
P R O C E S S E S |
N O V E M B E R / D E C E M B E R
2 0 1 6
4 3
FEATURE ARTICLE
11
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100-1000 nm is generally required to maximize permittivity of
ferroelectric ceramics. Post-deposition annealing treatment is
required to achieve grain growth, improve crystal quality, and
relieve residual stresses, which increases dielectric constant
and promotes ferroelectricity.
CONCLUSION
Aerosol deposition is a solid state deposition process
that is gaining interest as it can produce functional metallic,
ceramic, and composite coatings at room temperature and
can potentially further device design, fabrication, and inte-
gration. The fundamental knowledge behind particle plastic
deformation and bonding for coating consolidationwas inves-
tigated. The flexibility of the aerosol deposition process allows
investigation of a variety of potential applications, including
electrical interconnects, electrical insulating coatings, and di-
electric coatings toward capacitor fabrication. The AD process
offers an alternative to conventional thin film processes when
mesoscale coatings are required. The AD process also offers
an alternative to conventional thermal spray processes when
near 100% coating density and compatibility with a thermally
sensitive component is required.
~iTSSe
For more information:
Pylin Sarobol is senior technical staff
member, coatings and additive manufacturing R&D at Sandia
National Laboratories, P.O. Box 5800, Albuquerque, NM 87185,
505.284.7699,
psarobo@sandia.gov,
www.sandia.gov.
Acknowledgment
The authors thank Donald Susan, Deidre Hirschfeld,
Rick Kellogg, and Aaron Hall for their support. This work is
supported by Office of Electricity and Laboratory Directed
Research and Development Program at Sandia National Lab-
oratories. Sandia National Laboratories is a multi-mission
laboratory managed and operated by Sandia Corp., a wholly
owned subsidiary of Lockheed Martin Corp., for the U.S. DOE’s
National Nuclear Security Administration under contract
DE-AC04-94AL85000.