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ELECTRONIC DEVICE FAILURE ANALYSIS | VOLUME 18 NO. 2

50

LITERATURE REVIEW

T

he current column covers peer-reviewed articles published since 2014 on optical microscopy, optical fault isolation

techniques, photondetectors, andone giant wave. Optical methods and techniques are fundamental tonondestruc-

tive analysis of modern integrated circuits. Note that inclusion in the list does not vouch for the article’s quality,

and category sorting is by no means strict.

If you wish to share an interesting recently published peer-reviewed article with the community, please forward the

citation to the e-mail address listed above and I will try to include it in future installments.

Entries are listed in alphabetical order by first author, then title (in bold), journal, year, volume, and first page. Note

that in some cases bracketed text is inserted into the title to provide clarity about the article subject.

Peer-Reviewed Literature of Interest to Failure Analysis: Optics, Optical Techniques,

and a Ripple in the Universe

Michael R. Bruce, Consultant

mike.bruce@earthlink.net

• B.P. Abbott et al.:

“[Nondestructive] Observation of

Gravitational Waves [Using Laser Interferometry]

from a Binary Black Hole Merger,”

Phys. Rev.

Lett.,

 2016,

116,

p. 061102. Also see

“Viewpoint:

The First Sounds of Merging Black Holes,”

Physics,

Feb. 11, 2016,

9

(17),

physics.aps.org/articles/v9/17.

(Editor’s note: No black holes were destroyed by this

measurement.)

• K. Agarwal, R. Chen, L.S. Koh, et al.:

“Crossing the

Resolution Limit inNear-Infrared Imaging of Silicon

Chips: Targeting 10-nmNode Technology,”

Phys. Rev.

X,

2015,

5,

p. 021014. See also

“Synopsis: Zooming in

on Failures,”

Physics,

May 6, 2015,

physics.aps.org/ synopsis-for/10.1103/PhysRevX.5.021014.

• R. Attota, and R.G. Dixson:

“Resolving Three-

Dimensional Shape of Sub-50nm Wide Lines with

Nanometer-Scale Sensitivity Using Conventional

Optical Microscopes,”

Appl. Phys. Lett.,

2014,

105,

p.

043101.

• L. Bidani, O. Baharav, M. Sinvani, and Z. Zalevsky:

“Usage of Laser Timing Probe for Sensing of

Programmed Charges in EEPROM Devices,”

Dev.

Mater. Reliab.,

IEEE Trans.,

2014,

14,

p. 304.

• T.H. Cheng, Y. Chu-Su, C.S. Liu, and C.W. Lin:

“Phonon-

Assisted Transient Electroluminescence in Si,”

Appl.

Phys. Lett.,

2014,

104,

p. 261102.

• T.B. Cilingiroglu, A. Uyar, A. Tuysuzoglu, et al.:

“Dictionary-Based Image Reconstruction for

Superresolution in Integrated Circuit Imaging,”

Opt.

Express,

2015,

23,

p. 15072.

• I. DeWolf,

“Relation between Raman Frequency and

Triaxial Stress in Si for Surface and Cross-Sectional

Experiments in Microelectronics Components,”

J.

Appl. Phys.,

2015,

118,

p. 053101.

• R. Horstmeyer, R. Heintzmann, G. Popescu, et al.:

“Standardizing the Resolution Claims for Coherent

Microscopy,”

Nat. Photon.,

2016,

10,

p. 68.

• A. Inglese, J. Lindroos, and H. Savin:

“Accelerated

Light-Induced Degradation for Detecting Copper

Contamination in p-Type Silicon,”

Appl. Phys. Lett.,

2015,

107,

p. 052101.

• W. Lei, J. Antoszewski, F. Jarek, et al.:

“Progress,

Challenges, and Opportunities for HgCdTe Infrared

Materials and [MCT] Detectors,”

Appl. Phys. Rev.,

2015,

2,

p. 041303.

• U. Leonhardt and S. Sahebdivan:

“[Using Far-Field

Optics for Near-Field Sub-Wavelength Imaging:]

Theory of Maxwell’s Fish Eye with Mutually

Interacting Sources and Drains,”

Phys. Rev. A,

2015,

92,

p. 053848.

• M.A. Miller, P. Tangyunyong, and E.I. Cole, Jr.:

“Characterization of Electrically-Active Defects in

Ultraviolet Light-Emitting Diodes with Laser-Based

Failure Analysis Techniques,”

J. Appl. Phys.,

2016,

119,

p. 024505.

• N. Naka, S. Kashiwagi, Y. Nagai et al.:

“Micro-Raman

Spectroscopic Analysis of Single Crystal Silicon

Microstructures for Surface Stress,”

Jpn. J. Appl.

Phys.,

2015,

54,

p. 106601.

• C. Park, J.-H. Park, C. Rodriguez, et al.:

“Full-Field

Subwavelength Imaging Using a Scattering

Superlens,”

Phys. Rev. Lett.,

2014,

113,

p. 113901.