ELECTRONIC DEVICE FAILURE ANALYSIS | VOLUME 18 NO. 2
44
PRODUCT NEWS
CONTINUED FROM
PAGE 42
Auger electron spectrometers were introduced in the
early 1960s, and since that time, they have improved in
performance, increased in size, and today can cost well
over $1 million. RBD’s microCMA provides high perfor-
mance in a small form factor for a tiny fraction of what
larger CMAs cost.
ion beam (FIB), Auger, secondary ionmass spectrometry,
and reflected-light microscope systems.
The EM-Tec MCS series is made using the latest MEMS
manufacturing techniques with high-contrast chromium
deposited lines for the larger features and gold-over-chro-
mium for the smaller features below 2.5 µm. This ensures
optimum signal-to-noise ratio for calibration purposes.
The MCS-1 has a scale ranging from 2.5 mm to 1 µm and
is ideal for tabletop and compact SEMs covering 10 to
20,000
×
magnifications. TheMCS-0.1 scale covers awider
range, from 2.5 mm down to 100 nm, which is especially
useful for 10 to 200,000
×
inSEM, FEGSEM, andFIB systems.
The M-10 calibration standard has a grid pattern
etched in the surface of an ultraflat silicon substrate and
provides a simple yet practical tool for magnification
calibration and image-distortion assessments. The M-10,
with a 10-µm-pitch grid pattern, is intended for 100 to
1000
×
magnification.
Both the MCS and M calibration standards are sup-
plied with certificates of traceability. The MCS series has
the option of an individual certificate of calibration. The
MCS-0.1 calibration standard is an excellent replacement
for thediscontinuedSIRA calibration standard, withadded
advantages.
These standards can also be supplied as part of the
multistandard range. The commonly used “Gold on
Carbon” and “Tin on Carbon” resolution standards can be
combined on a stub of your choice with MCS or M series
standards for quick and easy coverage of all the commonly
used SEM calibrations.
For more information: web:
emresolutions.com.
KEYSIGHT OFFERS ROBUST
HANDHELD DMMs
Keysight Technologies, Inc. (Santa Rosa, Calif.)
announced two new series of handheld digital multime-
ters (DMMs). In addition to offering the capabilities and
measurement functions needed for the electronics and
industrial test segments, the U1280 Series and U1240C
Series handheld DMMs are extremely rugged and come
with extended battery life to allow users to test and log
data over a longer period of time.
With 60,000-count display resolution and 0.025%
accuracy, the U1280 Series is Keysight’s highest-perfor-
mance handheld DMM. These 4.5-digit handheld DMMs
offer the precision, accuracy, and repeatability engineers
RBD Instruments’ microCMA
“Our microCMA is a real game-changer in the world of
thin-film surface analysis,” Dellwo explained. Many ana-
lytical vacuum chambers have a small open port where
themicroCMA could be added. Installing amicroCMA onto
such an existing vacuum chamber can be an ideal way to
add the AES surface analysis technique while eliminating
the need for additional vacuum hardware.
Bymaking the CMA smaller, the vacuumchamber and
pumping requirements are also reduced, whichhelpmake
AESmuchmoreaffordable to researchers. Smaller vacuum
chambers and pumps reduce the overall cost of a vacuum
system by a significant amount.
The small size of themicroCMA alsomakes AES practi-
cal as an analytical technique for small vacuumchambers
used in research areas such as thermal desorbed spectros-
copy and atomic layer deposition.
For more information: web:
rbdinstruments.com; tel:
541.550.5016.
EM RESOLUTIONS INTRODUCES
MAGNIFICATION STANDARDS
EM Resolutions (Essex, U.K.) has extended its range of
resolution andmagnification standards for scanning elec-
tronmicroscopy (SEM) with the introductionof the EM-Tec
MCS and M series of magnification calibration standards.
These fully featured practical calibration standards have
been specially developed for magnification calibration
or critical dimension measurements in tabletop SEM,
standard SEM, field emission gun SEM (FEGSEM), focused