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ELECTRONIC DEVICE FAILURE ANALYSIS | VOLUME 18 NO. 2

44

PRODUCT NEWS

CONTINUED FROM

PAGE 42

Auger electron spectrometers were introduced in the

early 1960s, and since that time, they have improved in

performance, increased in size, and today can cost well

over $1 million. RBD’s microCMA provides high perfor-

mance in a small form factor for a tiny fraction of what

larger CMAs cost.

ion beam (FIB), Auger, secondary ionmass spectrometry,

and reflected-light microscope systems.

The EM-Tec MCS series is made using the latest MEMS

manufacturing techniques with high-contrast chromium

deposited lines for the larger features and gold-over-chro-

mium for the smaller features below 2.5 µm. This ensures

optimum signal-to-noise ratio for calibration purposes.

The MCS-1 has a scale ranging from 2.5 mm to 1 µm and

is ideal for tabletop and compact SEMs covering 10 to

20,000

×

magnifications. TheMCS-0.1 scale covers awider

range, from 2.5 mm down to 100 nm, which is especially

useful for 10 to 200,000

×

inSEM, FEGSEM, andFIB systems.

The M-10 calibration standard has a grid pattern

etched in the surface of an ultraflat silicon substrate and

provides a simple yet practical tool for magnification

calibration and image-distortion assessments. The M-10,

with a 10-µm-pitch grid pattern, is intended for 100 to

1000

×

magnification.

Both the MCS and M calibration standards are sup-

plied with certificates of traceability. The MCS series has

the option of an individual certificate of calibration. The

MCS-0.1 calibration standard is an excellent replacement

for thediscontinuedSIRA calibration standard, withadded

advantages.

These standards can also be supplied as part of the

multistandard range. The commonly used “Gold on

Carbon” and “Tin on Carbon” resolution standards can be

combined on a stub of your choice with MCS or M series

standards for quick and easy coverage of all the commonly

used SEM calibrations.

For more information: web:

emresolutions.com

.

KEYSIGHT OFFERS ROBUST

HANDHELD DMMs

Keysight Technologies, Inc. (Santa Rosa, Calif.)

announced two new series of handheld digital multime-

ters (DMMs). In addition to offering the capabilities and

measurement functions needed for the electronics and

industrial test segments, the U1280 Series and U1240C

Series handheld DMMs are extremely rugged and come

with extended battery life to allow users to test and log

data over a longer period of time.

With 60,000-count display resolution and 0.025%

accuracy, the U1280 Series is Keysight’s highest-perfor-

mance handheld DMM. These 4.5-digit handheld DMMs

offer the precision, accuracy, and repeatability engineers

RBD Instruments’ microCMA

“Our microCMA is a real game-changer in the world of

thin-film surface analysis,” Dellwo explained. Many ana-

lytical vacuum chambers have a small open port where

themicroCMA could be added. Installing amicroCMA onto

such an existing vacuum chamber can be an ideal way to

add the AES surface analysis technique while eliminating

the need for additional vacuum hardware.

Bymaking the CMA smaller, the vacuumchamber and

pumping requirements are also reduced, whichhelpmake

AESmuchmoreaffordable to researchers. Smaller vacuum

chambers and pumps reduce the overall cost of a vacuum

system by a significant amount.

The small size of themicroCMA alsomakes AES practi-

cal as an analytical technique for small vacuumchambers

used in research areas such as thermal desorbed spectros-

copy and atomic layer deposition.

For more information: web:

rbdinstruments.com

; tel:

541.550.5016.

EM RESOLUTIONS INTRODUCES

MAGNIFICATION STANDARDS

EM Resolutions (Essex, U.K.) has extended its range of

resolution andmagnification standards for scanning elec-

tronmicroscopy (SEM) with the introductionof the EM-Tec

MCS and M series of magnification calibration standards.

These fully featured practical calibration standards have

been specially developed for magnification calibration

or critical dimension measurements in tabletop SEM,

standard SEM, field emission gun SEM (FEGSEM), focused