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ELECTRONIC DEVICE FAILURE ANALYSIS | VOLUME 18 NO. 2

26

the identical

D

x

before and after turning off the doping-

dependent mobility degradation. The diffusion current

peaks of both devices shift to shorter times, and the peak

heights of both increase. Moreover, the current peak

height of the 16 nm device increases greater than that of

the 20 nm device, suggesting the mobility degradation

is larger for the 16 nm device. Figure 16 compares

Q

coll

as

a function of the relative

D

x

before and after turning off

the mobility degradation for each SRAM device. The

Q

coll

with

D

x

~ 0 (including drift and diffusion currents) does

not change after turning off the model, because charge

mobility is dominated by the high electric field in the

drain region. The

Q

coll

with larger

D

x

(diffusion current

Fig. 16

Comparison for

Q

coll

(

D

x

) before and after turning off the doping-dependent charge mobility model

only) for all nodes increases after turning off the mobility

degradation. Clearly, doping profiles significantly impact

the diffusion component, having an increasingly large role

in decreasing charge collection with scaling. Finally, after

normalizing for the changes in the drain area, as shown in

Fig. 17, it is found that the distributions of cluster length

of all nodes are similar.

SUMMARY AND CONCLUSIONS

The introduction of the FinFET transistor architec-

ture has resulted in a significant reduction in the rate

of radiation-induced soft errors in SRAMs for all known

particle-strikemechanisms. Both single-bit andmulticell

Fig. 17

Q

coll

(

D

x

) distributions with the model off normalized for identical drain area