edfas.org ELECTRONIC DEVICE FAILURE ANALYSIS | VOLUME 28 NO. 1 46 Designed to retrofit all SEM models, the Smarprobe uses force-free connectors to enable seamless installation and removal from the SEM chamber. As an accessory to the prober, the Smarprobe etching station enables ondemand, cost-effective probe tip fabrication for maximum efficiency in daily operations. The Smarprobe’s fully closed-loop motion system ensures reproducible positioning with exceptional stability. This enables faster, more reliable, and highly automated measurements. For more information, visit smaract.com. ECONOMICAL APPROACH TO I-V CURVE TRACING Rather than pooling resources for shared equipment, labs can now equip individual engineers with their own I-V curve tracer. Source measure unit (SMU) instruments from Keithley, a Tektronix company, are portable and fit easily on test benches. Moreover, users still have all the source, sink, and measure capabilities of Keithley SMUs with curve tracer functionality only a few clicks (or touches) away. It’s also easy to export curves or screenshots, and there’s no need to scour online listings for spare parts. A Keithley SMU running Keithley’s I-V Tracer software represents a cost-effective way to gain all the usability benefits of a classic curve tracer without the burden that comes with trying to maintain a vintage instrument. When it comes to failure analysis of semiconductor devices, I-V curve tracers are popular because they provide precise control and immediate results. However, if too PRODUCT NEWS Ted Kolasa, Northrop Grumman ted.kolasa@gmail.com PRESS RELEASE SUBMISSIONS: MAGAZINES@ASMINTERNATIONAL.ORG SMARPROBE SUPPORTS SEMI-BLIND NANOPROBING The Smarprobe for semi-blind operation opens new possibilities for SEM-based nanoprobing. Thanks to integrated position sensors and real-time position control in a closed control loop, probes and samples can be reliably positioned without visual feedback from the SEM. This allows all available technology nodes to be probed with minimal electron beam exposure. For example, no degradation of e-beam-sensitive FD-SOI devices is observed at electron energies of 200 eV and higher. Active temperature control ensures extremely low drift and maintains reliable position control over a long period of time. Each probe tip can also measure surface topography if required, offering additional versatility. The Keithley 2400 Series Graphical SMU utilizing I-V curve tracer software to recreate the familiar user experience of a curve tracer for low-power two-terminal devices. Reduced beam exposure increases probe lifetime, which is one of the biggest challenges in increasing probing throughput. In addition, automated routines for probe alignment, probe landing, and cross-cleaning increase lifetime. These new developments significantly speed up the entire probing workflow. EBAC/EBIC are typically part of the probing workflow and often require a change in the SEM aperture to increase the beam current. To simplify the workflow and reduce beam exposure, the Smarprobe is equipped with a highly sensitive EBAC/ EBIC amplifier that enables imaging at low beam currents without the need to change the SEM aperture or cabling outside the SEM chamber. The Smarprobe nanoprober with closed-loop motion system is available with 2, 4, 6, or 8 probes.
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