edfas.org ELECTRONIC DEVICE FAILURE ANALYSIS | VOLUME 27 NO. 4 44 The EDFAS Education Subcommittee strives for the development and delivery of educational products to the EDFAS membership. Keeping with its strategic focus on reaching a broader audience, including facilitating Q&A and educational exchanges on the ASM Connect platform, the Subcommittee presents short format videos on selected FA topics. These presentations are available on ASM Connect by selecting the Library tab in the EDFAS online community. Use the following link: https://bit. ly/4n3Ozpz. An ASM Connect login is required. In this issue, we are highlighting a tutorial by Katherine Rice from CAMECA Instruments on Atom Probe Tomography: Introduction and Applications to Semiconductors. EDUCATION NEWS Navid Asadi nasadi@ufl.edu SPOTLIGHT ON TUTORIALS This tutorial introduces the fundamentals of atom probe tomography (APT) and explores applications in the field of semiconductor analysis. APT is a cutting-edge technique capable of delivering three-dimensional, atomic-scale compositional mapping with equal sensitivity to all elements in the periodic table. This makes it uniquely suited for analyzing complex materials and interfaces at the nanoscale, such as in failure analysis applications. In this brief tutorial, Rice covers the basic principles of APT, how it works, and how it has become an essential tool for researchers and engineers working in advanced materials and semiconductor development. APT is being used by leading semiconductor companies, academic institutions, and national laboratories to investigate Fig. 1 Examples of atom probe tomography use cases.
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