edfas.org ELECTRONIC DEVICE FAILURE ANALYSIS | VOLUME 27 NO. 4 20 NOTEWORTHY NEWS NANOTS 2025 The 45th annual NANO Testing Symposium (NANOTS 2025) will be held November 11-13 at the Senri Life Science Center, in Toyonaka, Osaka, Japan. NANOTS is one of the leading technical symposiums for discussing solutions that improve the testing process of nanoscale devices and materials. NANOTS is sponsored by the Institute of NANO Testing in cooperation with the Institute of Electronics, Information and Communication Engineers, the Japan Society of Applied Physics, the Reliability Engineering Association of Japan, and the Union of Japanese Scientists and Engineers. For more information, visit the NANOTS website at https://inanot.sakura.ne.jp/nanots. 2. Z.J. Ding, et al.: “Charging Effect Induced by Electron Beam Irradiation: A Review,” Science and Technology of Advanced Materials, 2021, 22(1), p. 932-971. 3. S. Zheng, et al.: “Influence of Electron Beam Irradiation Induced Charging-effect on Nanoprobing Localization of a Crystal Defect in MOSFET,” Microelectron. Reliab., 151, 2023. 4. S. Cristoloveanu: “Electrostatics of FD-SOI MOSFETs and the Role of the Buried Oxide,” Solid-State Electronics, 2016, 122, p. 131-142. 5. M. Assous, et al.: “Impact of Buried Oxide Charging on FD-SOI Devices under Irradiation,” IEEE Trans. Device Mater. Rel., 2014, 14, p. 377-384. 6. D.C. Joy: “Monte Carlo Modeling for Electron Microscopy and Microanalysis,” J. Microscopy, 1987, 147, p. 51-64. 7. www.smaract.com/en/probes/product/smarprobe-etch. 8. www.smaract.com/en/nano-probing. ABOUT THE AUTHORS Marc Heinemann studied physics with a specialization in semiconductor physics. He subsequently worked as a research scientist at the National University of Singapore, focusing on organic semiconductors. He pursued his Ph.D. at the Helmholtz Zentrum Berlin, Germany, where his research addressed defect analysis and the fabrication of compound semiconductor devices. Following this, he joined the National Renewable Energy Laboratory (NREL), United States, concentrating on defect characterization and device processing in oxide materials. Currently, he is with SmarAct Metrology, contributing to the development of advanced nanoprobing solutions. His work integrates expertise in semiconductor physics, materials science, and precision instrumentation to enable innovations in nanoscale measurement and analysis. Markus Reichel studied engineering physics in both his bachelor’s and master’s programs at the Carl von Ossietzky University of Oldenburg. He obtained his bachelor of engineering degree with a thesis on easy and reliable production of ultra-fine probes. During his master’s thesis, he worked on novel types of AFM cantilevers. Both his bachelor’s thesis and his master’s thesis were carried out at SmarAct, where he subsequently completed his master of science degree in 2021. Following his graduation, he joined SmarAct as a quality engineer for nano-positioners. Later he became part of the nanoprobe development team, where he contributed to the system’s design and advancement. Today, his work primarily focuses on further improvements of the nanoprobing solutions.
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