edfas.org ELECTRONIC DEVICE FAILURE ANALYSIS | VOLUME 27 NO. 4 16 automated image-based recognition—it becomes theoretically feasible to navigate the system based solely on pre-defined coordinate data derived from the corresponding CAD layout. An example of this is shown in Fig. 3. Under ideal conditions, such a procedure would negate the need for active SEM monitoring during navigation. However, this approach is often not possible due to two principal limitations of most motion systems: (1) the absence or inadequacy of integrated nanometer-precise position sensors across all motion axes in standard probing systems, and (2) the challenge of safely landing delicate probe tips without real-time visual feedback, which risks mechanical damage to both probes and sample structures. SmarAct’s SMARPROBE nanoprobing platform was chosen to address the aforementioned challenges.[8] This system provides several critical advantages that substantially reduce electron beam exposure and enhance probing reliability. First, the integration of fully encoded nanosensors enables navigation to predefined points of interest (POIs) solely by coordinate data, thereby eliminating the need for continuous SEM imaging during probe movement. Second, the system’s automated landing routines allow safe probe placement on both conductive and insulating surfaces without requiring visual feedback. Third, closed-loop control with active compensation corrects for intrinsic limitations of piezo-driven actuators, Fig. 2 Probing at 100 eV is more difficult due to stronger image distortion and shadowing induced by the probes. Special low-eV probes from the SMARPROBE etching station reduce but do not completely eliminate these effects. Fig. 3 Position of probes and sample can be set via three-point alignment routines and automated probe recognition. Relevant interconnects for the probing process are imported into the SMARPROBE user interface and superimposed on the SEM image. The positions of the probes are shown in yellow.
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