edfas.org 9 ELECTRONIC DEVICE FAILURE ANALYSIS | VOLUME 27 NO. 3 ABOUT THE AUTHORS Jianhui Liang is an applications engineering manager at KLA, where he leads the applications development team within KLA Instruments. Liang received his B.S. and Ph.D. in physics from Fudan University in 2011 and 2016, respectively. He has authored over 25 publications, which have garnered more than 600 citations. His work has been published in peer-reviewed journals such as Applied Physics Letters, Optics Express, Advanced Optical Materials, and Physical Review B. Jiali Zhang is a product development engineer at KLA. She is responsible for the development of advanced metrology products, including optical profilers, thin film reflectometers, sheet resistance measurement tools, and stylus profilers. She earned her Ph.D. in analytical chemistry from the University of California, Davis, where she developed SPM-based nanoprinting methodology for 3D nanofabrication. Her work has been published in journals such as the Journal of Physical Chemistry, JPC Letters, Tetrahedron Letters, Stem Cells, and Thin Solid Films. Kurt Johanns is an applications scientist at KLA. Based in Oak Ridge, Tenn., he primarily works with the Nanoindentation team in the KLA Instruments division. He received his Ph.D. in materials science and engineering from the University of Tennessee in 2014 and has been in the small-scale mechanical testing community for 20 years. Johanns enjoys developing unique test experiments for promoting and characterizing the failure of materials and material systems. Oskar Amster is the director of marketing at KLA Instruments, a division of KLA Corp. Amster has been with KLA in various roles for 12 years and worked for a range of instrumentation companies as an applications engineer, product/sales manager, and progressed to various management roles in the materials characterization field. He has been in the surface metrology and materials characterization field for over 25 years. Amster holds a master of science in materials engineering and a bachelor of science in physics from California Polytechnic San Luis Obispo. Blaise Cuénod is a process engineer at the Center of MicroNanoTechnology (CMi) at EPFL where he is in charge of the PVD and PECVD processes development for the CMi users community. Prior to joining CMi in 2021, he graduated from EPFL after completing a master’s in materials science and engineering with a minor in energy. Rémy Juttin studied at the University of Orléans and holds an engineering degree in electronics and optics, as well as a master’s degree in environments and materials in extreme conditions. He joined the Center of MicroNanoTechnology (CMi) at EPFL in 2015 as process engineer. Initially involved in the wet and dry etching section, he has been responsible for PVD equipment at CMi for over five years. Visit the Electronic Device Failure Analysis Society website edfas.org
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