edfas.org 11 ELECTRONIC DEVICE FAILURE ANALYSIS | VOLUME 27 NO.2 HIGH-RESOLUTION SIMS FOR PROCESS CONTROL High-resolution SIMS plays a pivotal role in process control within the microelectronics industry. The integration of SIMS with high-resolution ion microscopy offers unparalleled sensitivity and precision for elemental analysis, which is critical during various stages of device fabrication. LAYER COMPOSITION ANALYSIS High-resolution SIMS enables the precise determination of layer compositions in multilayered devices. This capability is complemented by high-resolution elemental imaging at <20 nm resolution, allowing for detailed visualization and mapping of elemental distributions at the nanoscale (Fig. 8). Such precision is particularly important for thin films, where uniformity and stoichiometry are crucial for optimizing device performance and ensuring reliability. IMPURITY DETECTION The detection and quantification of trace impurities in semiconductor materials are facilitated by SIMS’ high sensitivity. This ensures adherence to strict quality control standards and minimizes the risk of defects. DEPTH PROFILING SIMS provides high-depth resolution profiles of dopant distributions, which are essential for understanding diffusion processes and optimizing implantation techniques. This capability is vital for the development of advanced doping strategies in modern semiconductor devices. Fig. 8 High resolution SIMS mapping of a 65 nm CMOS process node logic device in a LGA flip chip package. The backside silicon substrate has been removed with a combination of CNC grinding and polishing followed with argon ion beam processing and xenon difluoride etching to allow direct access to the shallow trench isolation dielectric layer and the tungsten source drain contacts of the transistor region. 28Si + 29Si + 30Si in blue, all Ti isotopes in red. Fig. 6 3D reconstruction of the 85Rb+87Rb (orange) and 113In+115In (gray) isotopes, (FOV 20 µm). Fig. 7 The laser interferometer stage allows for precise sample navigation on CAD files.
RkJQdWJsaXNoZXIy MTYyMzk3NQ==