Nov 2024_EDFA_Digital

edfas.org ELECTRONIC DEVICE FAILURE ANALYSIS | VOLUME 26 NO. 4 26 Circuits and Systems, 2016, 6(2), p. 146–162, doi.org/10.1109/ jetcas.2016.2547718. 10. Y. Yu and M. Skowronski: “Growth Dominated Crystallization of GeTe Mushroom Cells during Partial SET Operation,” J. Appl. Phys., 2023, 133(4), p. 044501, doi.org/10.1063/5.0129023. 11. C.S. Bonifacio, et al.: “Large Field of View and Artifact-Free Plan View TEM Specimen Preparation by Post-FIB Ar Milling,” Proc. Int. Symp. Test. Fail. Anal. (ISTFA), 2022, p. 181-189. 12. C.S. Bonifacio, et al.: “Precise Final Thinning by Concentrated Ar Ion Beam Milling of Plan View TEM Specimens from Phase Change Memory Device Prepared in Xe Plasma FIB,” Proc. Int. Symp. Test. Fail. Anal. (ISTFA), 2023, p. 309-316, doi.org/10.31399/asm. cp.istfa2023p0309. 13. C.S. Bonifacio, et al.: “Cutting-edge Sample Preparation from FIB to Ar Concentrated Ion Beam Milling of Advanced Semiconductor Devices,” Proc. Int. Symp. Test. Fail. Anal. (ISTFA), 2020, p. 133-140, doi.org/10.31399/asm.cp.istfa2020p0133. 14. C. Bonifacio, et al.: “High Throughput and Multiple Length Scale Sample Preparation for Characterization and Failure Analysis of Advanced Semiconductor Devices,” Proc. Int. Symp. Test. Fail. Anal. (ISTFA), 2019, p. 295-301, doi.org/10.31399/asm.cp.istfa2019p0295. 15. A. Padilla, et al.: “Voltage Polarity Effects in Ge2Sb2Te5-based Phase Change Memory Devices,” J. Appl. Phys., 2011, 110(5), p. 054501, doi. org/10.1063/1.3626047. ABOUT THE AUTHORS Cecile Bonifacio has more than 19 years of experience in electron microscopy sample preparation, imaging, and analysis. Throughout this period, she has authored/co-authored more than 60 publications, given presentations at various meetings, and taught at Lehigh University’s Microscopy School. Her work as senior applications scientist at Fischione Instruments focuses on materials science TEM applications development and application support for the TEM sample preparation products and cryo-transfer product line. Yiqi Yu received her M.S. and Ph.D. degrees in materials science and engineering from Carnegie Mellon University in 2019 and 2022, respectively. Her research mainly involved processing phase change memory devices, electrical testing, materials characterization, and modeling crystallization during the SET process. Yu is a process integration engineer at Samsung Austin Semiconductor. Mary Louise Ray received a bachelor’s degree in journalism from Ohio University and a master’s degree in technical writing from Carnegie Mellon University. She is the marketing and communications manager at E.A. Fischione Instruments Inc. Marek Skowronski is a professor in the Department of Materials Science and Engineering, Carnegie Mellon University also holding a courtesy appointment in Department of Physics. Skowronski’s research interests cover a wide area of crystal growth, materials characterization by electron microscopy, as well as electronic device processing and modeling. Current projects are focused on non-volatile memory and threshold switching devices based on chalcogenide alloys and transition metal oxides. Prof. Skowronski has authored more than 300 technical publications and has an H-index over 50. Paul E. Fischione has played a significant role in electron microscopy for more than 35 years. Fischione is the CEO of E.A. Fischione Instruments Inc., a privately held, U.S.-based company that designs, manufactures, and distributes advanced microscopy devices for the global scientific community. Products include transmission and scanning electron microscopy sample preparation devices, plasma cleaners, and TEM tomography specimen holders. He was named a fellow of the Microscopy Society of America in 2017. Advertise in Electronic Device Failure Analysis magazine! For information about advertising in Electronic Device Failure Analysis: KJ Johanns, Business Development Manager 440.671.3851, kj.johanns@asminternational.org Current rate card may be viewed online at asminternational.org/advertise.

RkJQdWJsaXNoZXIy MTYyMzk3NQ==