edfas.org 47 ELECTRONIC DEVICE FAILURE ANALYSIS | VOLUME 26 NO. 2 with a single current collection image colored from black to red. The resulting red-on-grayscale images are excellent for displaying location and shape of EFA features. Other configurations can show current flow. Color coding assigns color to each of the probers, which allows a more complete visualization of complex systems. Image math is used to process data for e-beam injection techniques. With the advanced EFA module, it is now much easier to distinguish signals from EBIC and EBAC, or between RCI and EBIRCh. As a result, data interpretation becomes much more straightforward. For more information, visit imina.ch/en. ADVANCED AUTOMATION AND USABILITY FEATURES ON LARGESAMPLE ATOMIC FORCE MICROSCOPE Oxford Instruments Asylum Research announced the release of new features for the Jupiter XR atomic force microscope (AFM) to increase productivity and improve usability. The Jupiter AFM now includes a side-view camera that provides a direct high-resolution view of sample separation during tool setup, which dramatically improves usability and reduces the risk of operator errors. The side-view camera is included on new Jupiter systems and is available as an upgrade to existing systems. PRODUCT NEWS Ted Kolasa, Northrop Grumman ted.kolasa@gmail.com PRESS RELEASE SUBMISSIONS: MAGAZINES@ASMINTERNATIONAL.ORG ADVANCED EFA MODULE WITH COLOR-CODED MULTI-CHANNEL NANOPROBING Imina Technologies, together with partners at point electronic GmbH, has added new dedicated electronics and software to their integrated EFA solution. Now the signal from each probe is read by independent channels and is color-coded. Example of nanoprobe color code. The signal from each nanoprobe is assigned a different color. Multi-channel nanoprobing is based on an 8 miBots nanoprobing system from Imina with an integrated EFA system from point electronic GmbH, a dedicated in-situ EFA board with 8 pre-amplifiers, and an 8x multichannel signal (MICS) amplifier. Each of the nanoprobes has independent parallel routing and amplification, so eight independent nanoprobe images can be recorded simultaneously. Such a setup collects much more data as compared to established EFA techniques, where only one nanoprobe image can be recorded at a time. Calibrated gains and offsets of the MICS amplifier and EFA imaging enable quantitative measurements on the images collected by each nanoprobes. In this way, the signal interpretation can be confirmed by comparing measured values in the scan with measured current of the primary beam. The localization image is composed of the reference signal (typically secondary electrons) in grayscale mixed Jupiter XR atomic force microscope.
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