edfas.org ELECTRONIC DEVICE FAILURE ANALYSIS | VOLUME 26 NO. 2 34 Figure 3 shows an example of multilevel crosstalk seen in LVP waveforms that were collected from a 16 nm FinFET device using a 1064 nm probe and a 3.05NA solid immersion lens (SIL). Some brilliant ideas have been published regarding the removal or mitigation of LVP crosstalk.[3,4] Most of them require deconvolution using simulation vs. collected waveform data or a good understanding of the circuit of Fig. 2 An example of a dLVP waveform data set is shown. Clock (orange), pass (green), fail (red), and the subtracted differential resulting waveform (yellow) indicates where the waveforms differ in time under exactly the same test condition. Fig. 3 This figure shows an accurately overlaid CAD-to-stage alignment and the resultant waveforms from some of the devices targeted in the dense sea of gates.
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