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edfas.org ELECTRONIC DEVICE FAILURE ANALYSIS | VOLUME 26 NO. 1 8 Fig. 2 Panel I: (a) Example nanodiffraction patterns obtained using three different probe sizes. (b) A plot of the normalized variance, V, of the diffracted intensity as a function of scattering angle, k, for six different probe sizes. The variance is at maximum for small probes sizes suggesting a large degree of structural fluctuation in the Cu64.5Zr35.5 metallic glass at those length scales. Reproduced with permission from Ref 34. Panel II: (a) Normalized variance plots of amorphous TiO2 films grown at different temperatures. (b) Plots of the averaged angular correlation function reveals the presence of rotational symmetry by identifying angular correlation between diffraction speckles at the same k. Reproduced under the terms of a Creative Commons CC BY license.[33] Panel III: (a) Symmetry coefficients calculated from a 4D dataset acquired from Pd77.5Cu6Si16.5 along with spatial maps depicting regions exhibiting (b) 2-fold, (c) 4-fold, (d) 6-fold, (e) 8-fold, and (f) 10-fold symmetry. Reproduced with permission from Ref 41. I. II. III. (a) (b) (a) (b) (a) (b) (c) (d) (e) (f)

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