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edfas.org ELECTRONIC DEV ICE FA I LURE ANALYSIS | VOLUME 24 NO . 2 46 LITERATURE REVIEW T he current column comprises peer-reviewed articles published since 2019 on optical microscopy, optical fault isolation techniques, and photonics. Optical methods and techniques are fundamental to nondestructive analysis of modern integrated circuits. Note that inclusion in the list does not vouch for the article’s quality and category sorting is by no means strict. If you wish to share an interesting, recently published peer-reviewed article with the community, please forward the citation to the e-mail address listed above and I will try to include it in future installments. Entries are listed in alphabetical order by first author, then title, journal, year, volume, and first page. Note that in some cases bracketed text is inserted into the title to provide clarity about the article subject. Peer-Reviewed Literature of Interest to Failure Analysis: Optics, Optical Techniques, and Fault Isolation Michael R. Bruce, Consultant mike.bruce@earthlink.net • A. Beyreuther, N. Herfurth. C. Boit, et al.: “Contactless Device Characterization of Transistor Structures in Silicon using Electro Optical Frequency Mapping (EOFM),” Microelectron. Reliab., 2020, 106, p. 113583. • A. Beyreuther, I. Vogt, C. Boit, et al.: “Contactless Parametric Characterization of Bandgap Engineering in P-type FinFETs using Spectral Photon Emission,” Microelectron. Reliab., 2019, 92, p. 143. • Y. Chen, Y. Huang, W.G. Wu, et al.: “The Intrinsic Thermoreflectance Property of 4H-SiC,” J. Electron. Mater., 2022, 51, p. 429. • A.A. Demkov, C. Bajaj, and J.G. Ekerdt: “Materials for Emergent Silicon-integrated Optical Computing,” J. Appl. Phys., 2021, 130, p. 070907. • A.W. Elshaari, W. Pernice, K. Srinivasan, et al.: “Hybrid Integrated Quantum Photonic Circuits,” Nat. Photonics, 2020, 14, p. 285. • R. Fabbro, T. Haber, G. Fasching, et al.: “Defect Localization in High-power Vertical Cavity Surface Emitting Laser Arrays by Means of Reverse Biased Emission Microscopy,” Meas. Sci. Technol., 2021, 32, p. 095406. • M. Garin, J. Heinonen, L. Werner, et al.: “Black- Silicon Ultraviolet Photodiodes Achieve External Quantum Efficiency above 130%,” Phys. Rev. Lett., 2020, 125, p. 117702; also see Aalto University, “Black Silicon Photodetector Breaks the 100% Efficiency Limit,” https://phys.org/news/2020- 08-black-silicon-photodetector-efficiency-limit.html . • J. Jang, P. Liu., B. Kim, et al.: “Silicon Wafer Crack Detection using Nonlinear Ultrasonic Modulation Induced by High Repetition Rate Pulse Laser,” Optics and Lasers in Engineering, 2020, 129, p. 106074. • S.D. Johnson, P.-A. Moreau, T. Gregory, et al.: “How Many Photons Does it Take to Form an Image?” Appl. Phys. Lett., 2021, 116, p. 260504. • Y.U. Lee, J. Zhao, Q. Ma, et al.: “Metamaterial Assisted Illumination Nanoscopy via Random Super-resolution Speckles,” Nat. Commun., 2021, 12, p. 1559. • Y. Liu, J.E. Beetar, J. Nesper, et al.: “Single-shot Measurement of Few-cycle Optical Waveforms on a Chip,” Nat. Photonics, 2022, 16, p. 109. • D.M. Lukin, C. Dory, M.A. Guidry, et al.: “4H-silicon- carbide-on-insulator for Integrated Quantum and Nonlinear Photonics,” Nat. Photonics, 2020, 14, p. 330. • B. Ma, M. Tang, K. Ueno, et al.: “Combined Infrared Reflectance and Raman Spectroscopy Analysis of Si-doping Limit of GaN,” Appl. Phys. Lett., 2020, 117, p. 192103. • N. Margalit, C. Xiang, S.M. Bowers, et al.: “Perspective on the Future of Silicon Photonics and Electronics,” Appl. Phys. Lett., 2021, 118, 220501. • W.J. Padilla and R.D. Averitt: “[Review:] Imaging with Metamaterials,” Nat. Rev. Phys., 2022, 4, p. 85. • F. Sardi, T. Kornher, M. Widmann, et al.: “Scalable Production of Solid-immersion Lenses for Quantum Emitters in Silicon Carbide,” Appl. Phys. Lett., 2020, 117, p. 022105.
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