May_EDFA_Digital
edfas.org ELECTRONIC DEV ICE FA I LURE ANALYSIS | VOLUME 24 NO . 2 38 EDUCATION NEWS Bhanu P. Sood, NASA Goddard Space Flight Center bhanu.sood@nasa.gov SPOTLIGHT ON TUTORIALS T he EDFAS Education Subcommittee strives for the development and delivery of educational products to theEDFASmembership. Keepingwith its strategic focus on reaching a broader audience, including facilitat- ing Q&A and educational exchanges on the ASM Connect platform, the Subcommittee has recently started inviting ISTFA tutorial speakers to present short format presenta- tions on selected FA topics. These presentations are now available on ASMConnect. Use the following link: https:// bit.ly/3mCn7m6 and click on the Educational Tutorials folder. An ASM Connect login is required. For this issue, we are highlighting a tutorial by Joerg Jatzkowski andMichél Simon-Najasek on the topic of fault isolation using electron beam absorbed current (EBAC), also known as resistive current imaging, and electron beam induced current (EBIC) techniques. Inbothmethods the primary electron beam of the SEM acts as a local current source. The beam generates a current within the semiconductor structure that is conducted through probe needles placed in specific positions. This current is subse- quently amplified and finally synchronized with the SEM image. As a result, the acquired current image can directly be correlated to the IC structure of the sample under investigation. Their tutorial discusses basics andadvanced approaches of EBIC/EBAC imaging within an SEM and demonstrates their applications using case studies. The presentation can be accessed using the following link: https://bit.ly/3McSLkP. For additional information on the EDFAS Education Subcommittee, contact Bhanu Sood at bhanu.sood@ nasa.gov. Left, EBIC principle. Right, EBIC signal of a cross-sectioned diode showing the depletion zone. Left, EBAC principle. Right, EBAC signal of a metal network connected by a probe needle.
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