February_EDFA_Digital

edfas.org ELECTRONIC DEV ICE FA I LURE ANALYSIS | VOLUME 24 NO . 1 42 ISTFA 2021 CONTACTLESS PROBING AND NANOPROBING USER GROUP Chair/Co-Chairs: Dan Bockelman, Neel Leslie, and Sara Ostrowski dan.bockelman@intel.com, neel.leslie@thermofisher.com, saraostrowski@eurofinseag.com W ith ISTFA 2021 returning to an in-person con- ference, the Contactless and Nanoprobing EDFAS User Group followed suit. The ability to physically interact among conference attendees created a welcome open forum, where attendees could share and discover new technologies. The session featured seven focused presentations to initiate and stimulate insights, eventually leading to an open discussion among the par- ticipants. These focused topics covered a comprehensive range of failure analysis techniques including: scanning probe microscopy (SPM), lock-in thermography (LIT), e-beamprobing, optical fault isolation, and nanoprobing. The first presentation, “Current/Future Challenges for Contactless Optical Probing” by Dan Bockelman from Intel, kicked off an enticing forward look at the new architecture of transistors, packaging technolo- gies, and their potential implication to failure analysis challenges. A thought-provoking discussion regarding electrical stimulus, probe access points, and design for test (DFT) capability followed. Ashraf Rezaie from Intel, followed with his presentation, “LVP/VLP on sub-10 nm.” He reviewed the trade-offs between using different visible light wavelengths for laser voltage probing applications. The audience continued the discussion intoworkflowand questioning when it is appropriate to use infrared versus visible light for analysis. Sample preparation and probing challenges (bandwidth, edge placement) for the different wavelengths were also discussed. ArpanBhattacherjee fromSynopsys continuedwith the presentation titled “SysNav usage with optical probing.” Arpan’s talk provided a comprehensive insight into how the Synopsys SysNav software canbe used to trace a signal through a on a system on package. The session continued with Jim Vickers from Thermo Fisher Scientific, who presented, “E-beam Probing (High Bandwidth)” a follow up to his 2019 work. Using a stro- boscopic technique Jim was able to demonstrate an improved system measurement bandwidth of 2 GHz. He also shared high bandwidth waveforms and frequency maps. A rich discussion regarding the e-beamapplication and the newly presented transistor architecture followed. Continuing the topics on e-beam based technology, Ricky Arora from Thermo Fisher Scientific presented on “Automation in Nanoprobing.” Ricky shared the ability to auto-land and optimize probe contact at 500 eV landing energy. Concerns about the landing energy affecting the transistors voltage threshold were raised. Sung Park fromMolecular Vista presented, “IRPiFM for Sub-20 nmDefect Analysis and Metrology of Atomic-level Processing.” Sung provided a unique talk that highlighted the advantage of IR PiFM (photo-induced force micros- copy). By using the application Sung demonstrated the ability to detect the difference in the nature of the oxide layers at the top of a pillar vs a trench. Next Nicholas Antoniou from Prime Nano shared on “Quantification of Doping Concentration by sMIM.” Nicholas shared the ability for an automated and repeat- able way to measure a wide range of dopant levels. The audience had questions on signal noise and sample preparation requirements. Many people attended the live user group generat- ing conversations full of robust intellectual content. Participants shared experiences and were open to inquiring about new technologies and applications. The session concluded with a preview of the new EDFAS FA Technology Roadmap and a review of the FA Roadmap Council structure was shared. The new council looks to connect vendors, universities, and FA engineers to help streamline information and technology. “THE AUDIENCE CONTINUED THE DISCUSSION INTO WORKFLOW AND QUESTIONING WHEN IT IS APPROPRIATE TO USE INFRARED VERSUS VISIBLE LIGHT FOR ANALYSIS.”