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edfas.org ELECTRONIC DEV ICE FA I LURE ANALYSIS | VOLUME 23 NO . 4 26 3. R.H. Geiss, et al.: “Transmission EBSD in the Scanning Electron Microscope,” Microscopy Today, 2013, 21, p. 16-20. 4. C. Sun, et al.: “Analysis of Crystal Defects by Scanning Transmission Electron Microscopy (STEM) in a Modern Scanning Electron Microscope,” Adv. Struct. Chem. Imag., 2019, 5 (1). 5. D. McMullan: Scanning Electron Microscopy 1928-1965, Scanning, 1995, 17, p. 175–185. 6. P.G. Merli, et al.: Ultramicroscopy, 2003, 94, p. 89-98. 7. R.R. Keller, et al.: “Transmission Electron Diffraction From Nano- particles, Nanowires and Thin Films in an SEM with Conventional EBSD Equipment,” Microsc. Microanal., 2010, 116 (S2), p. 742-1743. 8. P. Trimby: “Orientation Mapping of Nanostructured Materials using Transmission Kikuchi Diffraction in the Scanning Electron Microscope,” Ultramicroscopy, 2012, 1210, p. 16-24. 9. P. Schweitzer, et al.: “LowEnergyNanoDiffraction (LEND) - A Versatile Diffraction Technique in SEM,” Ultramicroscopy, 2020, 213, p. 112956. 10. A. Orekhov, et al.: “Wide Field of View Crystal Orientation Mapping of Layered Materials,” https://arxiv.org/abs/2011.01875. 11. E. Brodu, et al.: “On-axis TKD for Orientation Mapping of Nano- crystalline Materials in SEM,” Matls. Char., 2017, 130, p. 92-96. 12. B. Caplins, et al.: “Transmission Imaging with a Programmable Detector in a Scanning ElectronMicroscope,” Ultramicroscopy, 2019, 196, p. 40-48. 13. J. Müller, et al.: “Features of Our SEM Transmission Diffraction Sub- stagewith 6-axis Sample Control and a Camerawith Variable Camera Length,” Microsc. Microanal., 2020, 26 (S2), p. 1906-1907. 14. J. Holm and B. Caplins: “STEM in SEM: Introduction to Scanning Transmission Electron Microscopy for Microelectronics Fail- ure Analysis,” 2020, https://doi.org/10.31399/asm.tb.stemsem. 9781627082921. 15. R.F. Egerton, et al.: “Radiation Damage in the TEM and SEM,” Micron, 2004, 35, p. 399–409. 16. O. Ugurlu, et al.: “Radiolysis to Knock-on Damage Transition in Zeolites under Electron Beam Irradiation,” Phys. Rev. B, 2011, 83, p. 113408. 17. J. Holm: “STEM-in-SEM Imaging and Diffraction with Extremely Beam Sensitive Ultrathin Zeolites,” Microsc. Microanal., submitted for publication 2021. 18. J. Liu and J.M. Cowley: “ImagingwithHigh-angle Scattered Electrons and Secondary Electrons in the STEM,” Ultramicroscopy, 1991, 37, p. 50-71. 19. J. Holm, and R.R. Keller: “Angularly-selective Transmission Imaging in a Scanning Electron Microscope,” Ultramicroscopy, 2016, 167, p. 43-56. 20. B. Caplins, et al.: “Orientation Mapping of Graphene in a Scanning Electron Microscope,” Carbon, 2019, 149, p. 400-406. 21. H. Yang, et al.: “4D STEM: High Efficiency Phase Contrast Imaging using a Fast PixelatedDetector,” Journal of Physics: Conference Series, 2015, 644, p. 012032. 22. B. Caplins, J. Holm, R. White, and R. Keller: “Orientation Mapping of Graphene using 4D STEM-in-SEM,” Ultramicroscopy, 2020, 219, p. 113137. 23. Ozdol, et al.: “Four-Dimensional Scanning Transmission Electron Microscopy (4D-STEM): From Scanning Nanodiffraction to Ptychog- raphy and Beyond,” Microsc. Microanal., 2019, 25, p. 563-582. 24. G. Wehmeyer, et al.: “Measuring Temperature-dependent Thermal DiffuseScatteringusingScanningTransmissionElectronMicroscopy,” Appl. Phys. Lett., 2018, 113, p. 253101. ABOUT THE AUTHOR JasonD. Holm returned to academia to earn a Ph.D. fromtheUniversity of Minnesota inmechanical engineering with a nanotechnology emphasis, after working several years in industry as amechanical engineer. He is currently a staff member at the National Institute of Standards and Technology (NIST) in the Nanoscale Reliability Group where he works as a materials research engineer. SCANNING TRANSMISSION ELECTRON MICROSCOPY (continued from page 25)