November_EDFA_Digital

edfas.org ELECTRONIC DEV ICE FA I LURE ANALYSIS | VOLUME 23 NO . 4 24 the optic axis to record the position, energy, and time of eachdetected electron. In addition to the vendor-supplied user interface, a python interface is available for custom operations. The practically unlimited dynamic range of this detector is an advantage over the other detectors described here, as is the potential for hyperspectral energy-based measurements/images (which have not yet been explored in an SEM). Although the frame rate and pixel size are not yet at the same level as high-end CMOS camera technology or other high-speed diffraction cameras currently used in TEMs or STEMs, the conve- nience of an extremely small footprint and ease of use are Fig. 5 4D STEM-in-SEM. (a) Experimental schematic. (b) The average DP from the dataset of a two-dimensional MoS 2 sample. The inset red circle and cross shows the direct beam center and approximate spot size. The inset green circles indicate the virtual annular aperture used to create (c) a marginal BF image. (d) The average DP of the ROI indicated in (b). (e) A DF image showing regions of the sample that scatter electrons into the small spot indicated in (d). (a) (b) (c) (d) (e)