May_EDFA_Digital

edfas.org ELECTRONIC DEV ICE FA I LURE ANALYSIS | VOLUME 23 NO . 2 42 EDUCATION NEWS T he EDFAS Education Subcommittee strives for the development and delivery of educational products to theEDFASmembership. Keepingwith its strategic focus on reaching a broader audience, including facilitat- ing Q&A and educational exchanges on the ASM Connect platform, the Subcommittee has recently started inviting ISTFA tutorial speakers to present short format presenta- tions on selected FA topics. These presentations are now available on ASMConnect. Use the following link: https:// bit.ly/3pNQdxn and click on the Educational Tutorials folder. For this issue, we are highlighting a scanning probe microscopy (SPM) tutorial presented by Peter De Wolf. Today, a wide range of characterization methods based on SPM are routinely applied for nanometer scale failure analysis. The standard capability of SPM to image the surface topography with nanometer scale spatial resolu- tion is augmentedwith the capability tomeasure a variety of physical properties: electrical, magnetic, thermal, mechanical, and more recently also chemical properties. This video provides a structured overview of these SPM modes, and compares them in terms of (i) physical properties characterized, (ii) spatial resolution, (iii) sensi- tivity, (iv) dynamic range, and (v) quantification potential. The capabilities and limitations of each operating mode are illustrated with examples from Si-based devices as well as other devices/materials such as compound semi- conductors, organic devices, and 1D and 2Dmaterials. An overview of recent tip technology that allows the user to obtain higher sensitivity and/or spatial resolution is also presented. A second part of the tutorial highlights recent trends for these modes, including correlation of multiple prop- erties and microscope methods, as well as spectroscopy in selected positions and in every pixel. Peter’s presenta- tion can be accessed using the following link: https:// bit.ly/3rrDroR. For additional information on the EDFAS Education Subcommittee, contact Bhanu Sood at bhanu.sood@ nasa.gov. SPOTLIGHT ON TUTORIALS A slide from Peter De Wolf’s tutorial available on ASM Connect. The tutorial gives an overview of characterization methods based on SPM for nanometer scale failure analysis.