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edfas.org 19 ELECTRONIC DEV ICE FA I LURE ANALYSIS | VOLUME 23 NO . 2 23. M. Holler, et al.: “High-resolutionNon-destructive Three-dimensional Imaging of Integrated Circuits,” Nature, 543 (7645), 2017, p. 402. 24. Y.C. Lin, et al.: “Unveiling 3D Morphology of Multiscale Micro- Nanosilver Sintering for Advanced Electronics Manufacturing by Ptychographic X-ray Nanotomography,” Advanced Engineering Materials, 22 (4), 2020, p. 8. 25. F.A. Hasenkamp: “RadiographicLaminography,” MaterialsEvaluation, 32 (8), 1974, p. 169. 26. L. Helfen, et al.: “Synchrotron-radiation Computed Laminography for High-resolution Three-dimensional Imaging of Flat Devices,” Physica Status Solidi a-Applications and Materials Science, 204 (8), 2007, p. 2760-2765. 27. L. Helfen, et al.: “On the Implementationof Computed Laminography Using SynchrotronRadiation,” Reviewof Scientific Instruments, 82 (6), 2011, p. 8. 28. M. Holler, et al.: “Three-dimensional Imaging of Integrated Circuits with Macro- to Nanoscale Zoom,” Nature Electronics, 2 (10), 2019, p. 464-470. 29. M. Holler, et al.: “LamNI - An Instrument for X-ray Scanning Microscopy in Laminography Geometry,” Journal of Synchrotron Radiation, 27, 2020, p. 730-736. 30. M. Eriksson, et al.: “Some Small-emittance Light-source Lattices with Multi-bend Achromats,” Nuclear Instruments & Methods in Physics Research Section a-Accelerators Spectrometers Detectors and Associated Equipment, 587 (2-3), 2008, p. 221-226. ABOUT THE AUTHORS MirkoHoller receivedaPh.D. inphysics fromthe ETHZurich (Swiss Federal Instituteof Technology) in 2010. At the Paul Scherrer Institute he is responsible for the development and operation of innova- tive high-resolution x-ray microscopes, as well as their application to scientific questions. Manuel Guizar-Sicairos received a B.Sc. degree in physics engineering in 2002 andM.Sc. in electronic systems in 2005 fromthe Tecnológico deMonterrey, Mexico. He received a M.Sc. in optics in 2008 and a Ph.D. in optics in 2010 from the Institute of Optics, University of Rochester, NewYork. He’sworked as a beam- line scientist since 2011, tenured in 2014, at the cSAXS beamline, Swiss Light Source, Paul Scherrer Institute, Switzerland. Guizar-Sicairos conducts research on method develop- ment, algorithm implementation, and application of coherent lensless imaging, ptychography, x-ray nanotomography, and scanning small-angle x-ray scattering. Jörg Raabe received a Ph.D. in physics from the University of Regensburg. At the Paul Scherrer Institut he is heading a research groupworking on high resolution x-ray imaging of various solid-state systems with a special focus on magnetic materials. Besides the application of x-ray microscopy to scientific questions, he is expert in developing cutting-edge x-ray microscopy instruments. Advertise in Electronic Device Failure Analysis magazine! For information about advertising in Electronic Device Failure Analysis: Kelly Johanns, Business Development Manager 440.318.4702, kelly.johanns@asminternational.org Current rate card may be viewed online at asminternational.org/mediakit. Physics Research Section a-Accelerators Spectrometers Detectors and Associated Equipment, 650 (1), 2011, p. 79-83. 14. M. Dierolf, et al.: “Ptychographic X-ray Computed Tomography at the Nanoscale,” Nature, 467 (7314), 2010, p. 436-439. 15. M. Holler and J. Raabe: “Error Motion Compensating Tracking Interferometer for the Position Measurement of Objects with Rotational Degree of Freedom,” Optical Engineering, 54 (5), 2015. 16. M. Holler, et al.: “An Instrument for 3D X-ray Nano-imaging,” Review of Scientific Instruments, 83 (7), 2012, p. 073703. 17. M. Holler, et al.: “X-ray Ptychographic Computed Tomography at 16 nm Isotropic 3D Resolution,” Scientific Reports, 4 , 2014, p. 3857. 18. P. Thibault andM. Guizar-Sicairos: “Maximum-likelihoodRefinement for Coherent Diffractive Imaging,” New Journal of Physics, 14, 2012. 19. M. Odstrčil, A. Menzel, andM. Guizar-Sicairos: “Iterative Least-squares Solver for Generalized Maximum-likelihood Ptychography,” Optics Express, 26 (3), 2018, p. 3108-3123. 20. M. Guizar-Sicairos, et al.: “Phase Tomography from X-ray Coherent Diffractive Imaging Projections,” Optics Express, 19 (22), 2011, p. 21345-21357. 21. M. Odstrcil, M. Holler, J. Raabe, and M. Guizar-Sicairos: “Alignment Methods for Nanotomography with Deep Subpixel Accuracy,” Optics Express, 27 (25), 2019, p. 36637-36652. 22. M. Holler, et al.: “OMNY PIN—A Versatile Sample Holder for Tomo- graphic Measurements at Room and Cryogenic Temperatures,” Review of Scientific Instruments, 88 (11), 2017, p. 113701.