November_December_2021_AMP_Digital

FEATURE A D V A N C E D M A T E R I A L S & P R O C E S S E S | N O V E M B E R / D E C E M B E R 2 0 2 1 4 3 8 (a) (b) Fig. 5 — (a) Quench probe used for DCGQ equipment characterization, and (b) DANTE model of the quench probe. Fig. 6 — Relationship between recipe setpoint and ambient temperatures at the end of the holds (left) and ramps (right) used for DCGQ recipe design and analysis. tances from the probe to measure the ambient tempera- ture. Using the time-temperature history of the quench probe and recorded ambient temperature for a given DCGQ recipe, along with a DANTE model of the quench probe, shown in Fig. 5b, the HTC and ambient temperatures can be determined. For DCGQ processes, the ambient temperature as a function of time is dependent on total mass, surface area, and initial temperature, just as it is with HPGQ, but the ambient temperature for DCGQ is also dependent on the temperature ramp and hold times. Figure 6 shows the re- Fig. 7 — Comparison of experimental and simulation results for one DCGQ recipe. 9