edfas.org 51 ELECTRONIC DEVICE FAILURE ANALYSIS | VOLUME 25 NO. 3 unnecessary. Two-channel EBIC can definitively separate different EBIC modes, which greatly facilitates image analysis and interpretation. The system is designed for versatility, allowing for STEM EBIC acquisition dur- ing in situ biasing and heating experiments on either custom-fabricated test devices or FIB-extracted cross section samples. For more information, visit www.nanoelectronicimaging.com. AI-BASED RARE EVENT DETECTION HARNESSES THE CAPABILITIES OF AUTONOMOUS CONFOCAL MICROSCOPY Leica Microsystems has launched Autonomous Microscopy powered by Aivia. This new AI-based detection workflow for confocal microscopy automates the detection of rare events. It follows what the user has defined as the objects of interest that will trigger the rare event scan. Users benefit from the potential to discover more by automatically detecting up to 90% of rare events during an experiment. By focusing on the data that matter during the acquisition process itself, time to result can be reduced by up to 70%. The Aivia-powered workflow reduces time spent at the microscope by up to 75%, leading to increased productivity. “Autonomous Microscopy powered by Aivia brings the power of artificial intelligence to everyday experimental environments in an easy-to-use way,” says James O’Brien, vice president of life sciences and applied microscopy at Leica Microsystems. “Researchers can now establish confocal microscopy workflows that address advanced experiments and questions that would be impossible or very laborious without automated procedures. This solution gives them outstanding new options to obtain results that answer their research questions.” The rare event detection workflow is based on the interaction of two components available on a Stellaris confocal system. Often, overview scans of the biological PRODUCT NEWS Ted Kolasa, Northrop Grumman ted.kolasa@gmail.com PRESS RELEASE SUBMISSIONS: MAGAZINES@ASMINTERNATIONAL.ORG LOW NOISE, TWO-CHANNEL STEM EBIC SYSTEM Electron beam-induced current (EBIC) imaging is a technique developed in the 1960s to map electric fields in devices by measuring the tiny currents produced in a sample by a scanning electron beam. It is most often performed in the scanning electron microscope (SEM) but is occasionally deployed in the scanning mode of the transmission electron microscope (S/TEM). Recent advances by NanoElectronic Imaging (NEI) in STEM EBIC techniques and hardware, including a thousand-fold improvement in current sensitivity, enable new highresolution imaging capabilities, including conductivity, and temperature mapping. STEM EBIC image contrast is directly related to electronic and thermal features, and images can be acquired alongside the standard STEM images, for which contrast is related to a sample’s physical properties. Simultaneously acquired images from these two complementary techniques tell a much more complete story about function and failure in electronic devices. NEI’s STEM EBIC system is compatible with most STEM-enabled TEM systems and features a custom EBIC/ biasing TEM sample holder. The system also includes EBIC-optimized sample substrates and electronics for current amplification and signal processing. An image with clear, sub-picoamp EBIC features, including secondary electron emission EBIC (SEEBIC), can be acquired in under two minutes. Extrinsic noise (e.g., line noise) is virtually undetectable, making image filtering or post-processing Example images illustrating resolution and image contrast provided by the NEI STEM EBIC system.
RkJQdWJsaXNoZXIy MTMyMzg5NA==