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ABOUT THE AUTHORS Aaron C. Johnston-Peck is a materials research engineer at the National Institute of Standards and Technology where he characterizes materials using various electron microscopy techniques. Prior to NIST, he worked as a postdoctoral fellow at Brookhaven National Laboratory and received his Ph.D. in materials science and engineering from North Carolina State University. He has contributed to 50 peer reviewed publications. Andrew A. Herzing is a materials research engineer at the National Institute of Standards and Technology where he develops materials characterization techniques with a particular interest in tomography and 4D-STEM. He received his Ph.D. in materials science and engineering from Lehigh University in 2007 and is currently serving as the president-elect of the Microanalysis Society.
RkJQdWJsaXNoZXIy MTMyMzg5NA==