edfas.org 27 ELECTRONIC DEV ICE FA I LURE ANALYSIS | VOLUME 25 NO . 1 26. L.R. Herlinger, S. Chevacharoenkul, and D.C. Erwin: “TEM Sample Preparation Using A Focused Ion Beam and A Probe Manipulator,” ISTFA 1996: Conference Proceedings from the 22nd International Symposium for Testing and Failure Analysis, p. 199-205, doi: 10.31399/asm.cp.istfa1996p0199. 27. M.H.F. Overwijk, F.C. v.d. Heuvel, and C.W.T. Bulle‐Lieuwma: “Novel Scheme for the Preparation of Transmission Electron Microscopy Specimens with a Focused Ion Beam,” Journal of Vacuum Science & Technology B: Microelectronics andNanometer Structures Processing, Measurement, and Phenomena, 1993, Vol. 11, No. 6, p. 2021-2024, doi: 10.1116/1.586537. 28. L.A. Giannuzzi, et al.: “Focused Ion Beam Milling and Micromanipulation Lift-Out for Site Specific Cross-Section TemSpecimen Preparation,” MRS Proceedings, 1997, Vol. 480, p. 19, Art no. 19, doi: 10.1557/PROC-480-19. 29. A. Leslie, et al.: “TEM Sample Preparation using FIB: Practical Problems and artifacts,” ASM International, Materials Park, OH (United States), 1995. ABOUT THE AUTHOR Cheryl Hartfield is Zeiss product marketing manager for FIB-SEM in materials science and electronics fields with a love of all things microscopy. She has a strong semiconductor background as a former senior member of Technical Staff at Texas Instruments where she worked for 12 years in characterization and package development. Hartfield co-founded Omniprobe to transform TEM sample preparation and was its business manager after Oxford Instruments’ acquisition. She has B.S. and M.A. degrees in microbiology from Texas A&M and UT Southwestern Graduate School of Biomedical Sciences. Hartfield is an ASM Fellow and past president of the Electronic Device Failure Analysis Society. She received the 2020 EDFAS President’s Award for exceptional service to the society, including positions as ISTFA Technical Program Chair and General Chair. She holds 15 patents and has published over 70 papers and book chapters.
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