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edfas.org 45 ELECTRONIC DEVICE FAILURE ANALYSIS | VOLUME 22 NO. 4 PRODUCT NEWS Ted Kolasa, Northrop Grumman ted.kolasa@gmail.com PRESS RELEASE SUBMISSIONS: MAGAZINES@ASMINTERNATIONAL.ORG HIGH RES AUTOMATED TIP SCANNING HEAD FOR INDUSTRIAL LARGE SAMPLE AFM Park Systems’ NX-TSH automated tip scan head is for large sample analysis over 300mm, and for heavy samples such as flat panel display glass and features conductive AFMby integrating amicroprobe station for electric defect analysis. The tip scanning head (TSH) is an automated moving tip head for industrial AFM developed for OLED, LCD, and photonics samples. The automated TSHmoves on an air- bearing stage that supports positioning over 3 degrees of freedom, moving directly to the desired point on the sample. “Park NX-TSH was developed specifically for manu- facturers setting up fabs to produce next-generation flat panel displayswith the objective to overcome the 300mm size threshold limit,” states Keibock Lee, Park Systems president. “Using conductive AFM, Park NX-TSHmeasures the sample surface with an optional probe station that contacts the sample surface and provides current into small devices or chips.” The automated NX-TSH system is equipped with a gantry style tip scanner system that moves directly to a place on the sample and produces high resolution images of the surface roughness, step height, critical dimensions, and sidewall measurements. The NX-TSH can scan the probe tip in x, y, and z direc- tions, up to 100 µm by 100 μm in the x-y plane and up to 15 μm in the z direction, and has a flexible chuck to accommodate largeandheavy samples. As thedemand for larger flat panel displays increases to 75 in. andmore, the NX-TSH overcomes these challenges with an automated tip scanning systemand nano-metrology challenges with a gantry style tip scanner system. Atomic forcemicroscopy is a highly accurate and non- destructive method of measuring samples at nanoscale and with the Park NX-TSH, reliable, high resolution AFM images can be obtained on OLEDs, LCDs, photomasks, and more. For more information, visit parksystems.com. NEONXGEN SINGLE LAYER FLEXIBLE GRAPHITE HEAT SPREADERS ELIMINATE COST, COMPLEXITY NeoGraf Solutions has launched NeoNxGen Thermal Management Solutions, a family of high-performance, thick, single layer flexible graphite solutions, which eliminate the cost, complexity, and reliability concerns of multi-layer systems. NeoNxGen advanced flexible graphite heat spreaders have the high thermal conductivity of synthetic graphite yet are much thicker than traditional synthetic products. These next generation solutions are primarily targeted for high-end consumer electronics such as notebook comput- ers, mobile phones, and tablets. Today, many modern electronics devices require multiple layers of synthetic graphite to function properly, according to Jon Taylor, product manager at NeoGraf. “These multiple layers are complicated to manufacture, expensive, and generate excessive scrap during the lamination process,” explains Taylor. NeoNxGen flexible graphite spreads a large amount of heat with a single layer yet is thin enough to fit in the limited allowable space of modern electronics. NeoNxGen flexible graphite has the thermal conduc- tivity of synthetic graphite (900 to 1100 W/mK). It exhibits strong repeated flexibility characteristics, making it good for applications like laptop computers, foldable dis- plays, or any other application where the product will be repeatedly flexed. In addition to consumer electronics, Park NX-TSH systemwith automated tip scan head.

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