August_EDFA_Digital

edfas.org 1 1 ELECTRONIC DEVICE FAILURE ANALYSIS | VOLUME 21 NO. 3 instrument. The tool is configured to allow modification and probing using photons, ions, and electrons (PIE) in one instrument platform. As depicted in Fig. 6, there are various modes of processing and data collection. In Mode 1, a broad ion beam (BIB) and SEM imaging is coin- cident. In Mode 2, a pFIB and SEM imaging is coincident. InMode 3, the pFIB and imaging secondary ionmass spec- troscopy (SIMS) are at optimal coincidence. In Mode 4, a femtosecond laser is oriented normal to the sample surface. A “standard” gas injection system (GIS) and in- chamber electron detectors (not shown) are orientated out of the horizontal plane. The compact Auger electron spectroscopy (AES) detector is also located out of the horizontal plane and may be operated concurrently with the SEM column. The configuration is based on actual available hardware components with accurate form factors. Note that the primary probes are arranged in the horizontal plane, with various detectors and accessories above thehorizontal planewitha vertical samplehandling arrangement. Several elements of the hardware and instrument controls are based on prior experience with components used in synchrotron-based instrumentation. The platform is intended to be ultra-high vacuumcompat- ible, but may also operate in the vacuum range typical for commercial electron and ion microscope platforms. The automated sample handling can accommodate several backside-loaded die along the vertical length of the sample carrier frame channel. Apreviously proven transfer design is used to capture the backloaded die into platens, which then insert into the vertical sample manipulator channel. Themanipulator allows precision x-y-z-rmotion. The sample may be rotated to face normal to any probe and the x-y translation can be used to control working distance with respect to any probe or set of probes. This vertical sample carrier channel was originally conceived to permit routing for cryogenic cooling of biological samples dispersed onto a silicon wafer. The overreaching concept of the platformaddressed is to combine a BIB and FIB into a common workflow to permit a range of resolution and scale to the physical delayering process. Rapid improve- ments in the affordability, reliability, and reduced form factor of femtosecond laser sources make them a very attractive addition to theworkstation. The augmentation of a new generation of compact ion and electron spec- trometers add yet another new dimension of elemental and chemical analysis to the data cube, while acquiring signals currently being ignored during the process. The sample handling is designed to easily accommodate multiple die for extended runs with a simple, reliable, and programmable range of motion. These represent some of the attractive features and functions of a dedicated IC deprocessing instrument. The instrument control platform for the proposed dedicated IC deprocessing instrument is based on the Experimental Physics Industrial Control System (EPICS) ( https://en.wikipedia.org/wiki/EPICS) . EPICS is an open Fig. 5 Isoview of PIE. Fig. 6 PIE platformdepicting primary deprocessing and analysismodes. Mode 1: Configuration for BIBmilling andSEM imaging. Mode 2: Configuration for pFIB delayering and SEM imaging. Mode 3: Configuration optimal for pFIB-SIMS imaging. Mode 4: Configuration for nonthermal bulk ablation.